B1530A中文资料安捷伦科技数据手册PDF规格书

Introduction

The Agilent B1500A Semiconductor Device Analyzer with EasyEXPERT software is a complete parametric test solution. It supports all aspects of parametric test, from basic manual measurement to test automation across a wafer in conjunction with a semiautomatic wafer prober. Because the B1500A utilizes the Microsoft® Windows® XP Professional operating system, it integrates easily into your PC-based work environment. Best of all, the familiar Windows graphical user interface (GUI) and convenient online help menus minimize the need for instrument training.

Basic Features

• PC-based instrument with touch screen interface; optional USB keyboard and mouse available

• EasyEXPERT software with over 200 categorized application tests supplied with the instrument

• Performs current versus voltage (IV) measurements

• Performs capacitance versus voltage (CV), capacitance versus time (Ct) and capacitance versus frequency (Cf) measurements

• Performs quasi-static CV (QSCV) measurements

• High voltage pulse forcing up to 40 V with ALWG and voltage monitor capabilities.

• Performs fast IV measurement synchronized with the applied waveforms for accurate transient IV or time-domain measurements

• Front-panel Classic Test measurement modes supported: single-channel sweep, multi-channel sweep, time sampling, list sweep, CV sweep and direct control (GPIB FLEX)

• GUI-based control of the Agilent B2200A, and B2201A switching matrices

• Modular mainframe with ten module slots and one 4.2 A ground unit

• Multiple source/monitor unit (SMU) types available: medium power (MPSMU), high-power (HPSMU), and high-resolution (HRSMU)

• Multi-frequency capacitance measurement unit (MFCMU) available

• High-voltage semiconductor pulse generator unit (HV-SPGU) available

• Waveform generator/fast measurement unit (WGFMU) available

• High-resolution, analog-to-digital converter (ADC) available to all installed SMUs

• High-speed ADC present on each installed SMU

• SMU/AUX path switching supported on the atto-sense and switch unit (ASU)

• SMU/MFCMU switching supported using SMU CMU unify unit (SCUU) and guard switch unit (GSWU)

• MFCMU automatically identifies capacitance measurement accessories

• WGFMU/SMU path switching supported on the remote-sense and switch unit (RSU)

• GPIB port for instrument control

• Self-test, self-calibration, diagnostics